Comments: Study of Semi-Recessed LOCOS for Quasi-nanoscale CMOS Device Isolation

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Bibliographic Details
Main Author:	Mohamad Idzham Abd Sani
Other Authors:	Zaliman Sauli, P.M. (Advisor)
Format:	Learning Object
Language:	English
Published:	Universiti Malaysia Perlis 2008
Subjects:	Metal oxide semiconductors, Complementary CMOS device isolation Semiconductor manufacturing Silicon Local oxidation of silicon (LOCOS)
Online Access:	http://dspace.unimap.edu.my/xmlui/handle/123456789/1362
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