Investigation and Modeling of Boron Diffusion Reduction in Silicon by Flourine Implantation using Numerical Simulation
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Main Author: | Chuah Soo Kiet |
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Other Authors: | Sharifah Norfaezah Sabki (Advisor) |
Format: | Learning Object |
Language: | English |
Published: |
Universiti Malaysia Perlis
2008
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Subjects: | |
Online Access: | http://dspace.unimap.edu.my/xmlui/handle/123456789/1348 |
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