Improving the Structural, Optical and Electrical Properties of ITO Nano-Layered Thin Films by Gas Flow Argon

• Main Authors: Q. Z., Mehdi, Hegde, Gurumurthy, Mohamad Ashry, Jusoh, Al-Dabbagh, Jinan B., Ahmed, Naser Mahmoud
• Format: Article
• Language: English
• Published: Trans Tech Publications, Switzerland 2014
• Subjects: Q Science (General)
• Online Access: http://umpir.ump.edu.my/id/eprint/8087/1/fist-2014-gurumurthy-Improving_the_structural%2C_optical.PDF; http://umpir.ump.edu.my/id/eprint/8087/; http://www.scientific.net/AMR.974.116

Indium tin oxide (ITO) thin films of 150 nm thickness were deposited on quartz glass substrates by RF sputtering technique, followed by thermal annealing treatment. In this technique, the samples have been annealed at different temperature, 300ᴼC, 400ᴼC, 500ᴼC respectively in Argon...