Study of the effects of neutral gas heating in a radio frequency inductively coupled plasma / Kanesh Kumar Jayapalan
A 13.56 MHz, planar coil, inductively coupled plasma reactor was experimentally and theoretically characterized; with emphasis on the effects of neutral gas heating on the distribution of the H mode magnetic fields of the source coil and the E-H mode transition characteristics of the discharge....
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| Format: | Thesis |
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2015
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| Online Access: | http://studentsrepo.um.edu.my/8332/1/Study_of_the_Effects_of_Neutral_Gas_Heating_in_a_RF_ICP_Final_ii.pdf http://studentsrepo.um.edu.my/8332/ |
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