Micro-diaphragm performance analysis for polyimide diaphragm

• Main Authors: Hasikin, K., Soin, N., Ibrahim, F.
• Format: Conference or Workshop Item
• Language: English
• Published: 2010
• Subjects: T Technology (General); TA Engineering (General). Civil engineering (General)
• Online Access: http://eprints.um.edu.my/9302/1/Micro-diaphragm_performance_analysis_for_polyimide_diaphragm.pdf; http://eprints.um.edu.my/9302/; http://www.scopus.com/inward/record.url?eid=2-s2.0-77957559410&partnerID=40&md5=01254ad1ac1ece862d371b3ce308834e http://ieeexplore.ieee.org/xpls/absall.jsp?arnumber=5549367

This paper presents a micro-diaphragm performance analysis for optical sensor for human pulse pressure detection. The effect of diaphragm radius and diaphragm thickness on the static and frequency responses were investigated. It can be concluded that the polyimide micro-diaphragm with a radius of 90μm and thickness of 4μm has achieved the optimum performance in term of the sensitivity, flexural rigidity and resonance frequency. © 2010 IEEE.