Micro-diaphragm performance analysis for polyimide diaphragm
This paper presents a micro-diaphragm performance analysis for optical sensor for human pulse pressure detection. The effect of diaphragm radius and diaphragm thickness on the static and frequency responses were investigated. It can be concluded that the polyimide micro-diaphragm with a radius of 90...
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| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2010
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| Subjects: | |
| Online Access: | http://eprints.um.edu.my/9302/1/Micro-diaphragm_performance_analysis_for_polyimide_diaphragm.pdf http://eprints.um.edu.my/9302/ http://www.scopus.com/inward/record.url?eid=2-s2.0-77957559410&partnerID=40&md5=01254ad1ac1ece862d371b3ce308834e http://ieeexplore.ieee.org/xpls/absall.jsp?arnumber=5549367 |
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| Summary: | This paper presents a micro-diaphragm performance analysis for optical sensor for human pulse pressure detection. The effect of diaphragm radius and diaphragm thickness on the static and frequency responses were investigated. It can be concluded that the polyimide micro-diaphragm with a radius of 90μm and thickness of 4μm has achieved the optimum performance in term of the sensitivity, flexural rigidity and resonance frequency. © 2010 IEEE. |
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