Photoconductivity in pulsed PECVD hydrogenated amorphous silicon thin films

• Main Authors: Tong, Goh Boon, Han, Shi Chee, Richard, Ritikos, Rasat, Muhamat Muhamad, Abdul, Rahman Saadah
• Format: Article
• Published: 2006
• Subjects: QC Physics
• Online Access: http://eprints.um.edu.my/7370/

Hydrogenated Amorphous Silicon (a-Si:H) thin films were deposited using a pulsed plasma enhanced chemical vapor deposition (PECVD) system developed in our laboratory. The pulsed discharge has been shown to allow deposition at higher power without deteriorating the film properties. In this work, we r...