Deposition, characterization, and modeling of scandium-doped aluminum nitride thin film for piezoelectric devices

• Main Authors: Zhang, Qiaozhen, Chen, Mingzhu, Liu, Huiling, Zhao, Xiangyong, Qin, Xiaomei, Wang, Feifei, Tang, Yanxue, Yeoh, Keat Hoe, Chew, Khian-Hooi, Sun, Xiaojuan
• Format: Article
• Published: MDPI 2021
• Subjects: QC Physics; QD Chemistry; TA Engineering (General). Civil engineering (General); TN Mining engineering. Metallurgy
• Online Access: http://eprints.um.edu.my/34408/

In this work, we systematically studied the deposition, characterization, and crystal structure modeling of ScAlN thin film. Measurements of the piezoelectric device's relevant material properties, such as crystal structure, crystallographic orientation, and piezoelectric response, were perform...