Tribological and thermal stability study of nanoporous amorphous boron carbide films prepared by pulsed plasma chemical vapor deposition

• Main Authors: Liza, S., Ohtake, N., Akasaka, H., Munoz-Guijosa, J.M.
• Format: Article
• Language: English
• Published: 2015
• Subjects: T Technology (General); TA Engineering (General). Civil engineering (General); TJ Mechanical engineering and machinery
• Online Access: http://eprints.um.edu.my/15770/1/Tribological_and_thermal_stability_study_of_nanoporous_amorphous_boron_carbide_films.pdf; http://eprints.um.edu.my/15770/; http://iopscience.iop.org/1468-6996/16/3/035007

In this work, the thermal stability and the oxidation and tribological behavior of nanoporous a-BC: H films are studied and compared with those in conventional diamond-like carbon (DLC) films. a-BC: H films were deposited by pulsed plasma chemical vapor deposition using B(CH3)(3) gas as the boron so...