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Generation of RFIC electrode patterns using electron beam lithography and wet etching characteristic of PZT thin film / Suriati Muhamad

This thesis report on fabrication technique of electride pattern using e-beam lithography and wet etching procss on lead zirconate titanate thin film. The patterns were created using Raith software,

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Main Author: Muhamad, Suriati
Format: Thesis
Language:English
Published: 2014
Online Access:https://ir.uitm.edu.my/id/eprint/86983/1/86983.PDF
https://ir.uitm.edu.my/id/eprint/86983/
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spelling my.uitm.ir.869832024-03-14T08:44:51Z https://ir.uitm.edu.my/id/eprint/86983/ Generation of RFIC electrode patterns using electron beam lithography and wet etching characteristic of PZT thin film / Suriati Muhamad Muhamad, Suriati This thesis report on fabrication technique of electride pattern using e-beam lithography and wet etching procss on lead zirconate titanate thin film. The patterns were created using Raith software, 2014 Thesis NonPeerReviewed text en https://ir.uitm.edu.my/id/eprint/86983/1/86983.PDF Generation of RFIC electrode patterns using electron beam lithography and wet etching characteristic of PZT thin film / Suriati Muhamad. (2014) Degree thesis, thesis, Universiti Teknologi MARA (UiTM).
institution Universiti Teknologi Mara
building Tun Abdul Razak Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknologi Mara
content_source UiTM Institutional Repository
url_provider http://ir.uitm.edu.my/
language English
description This thesis report on fabrication technique of electride pattern using e-beam lithography and wet etching procss on lead zirconate titanate thin film. The patterns were created using Raith software,
format Thesis
author Muhamad, Suriati
spellingShingle Muhamad, Suriati
Generation of RFIC electrode patterns using electron beam lithography and wet etching characteristic of PZT thin film / Suriati Muhamad
author_facet Muhamad, Suriati
author_sort Muhamad, Suriati
title Generation of RFIC electrode patterns using electron beam lithography and wet etching characteristic of PZT thin film / Suriati Muhamad
title_short Generation of RFIC electrode patterns using electron beam lithography and wet etching characteristic of PZT thin film / Suriati Muhamad
title_full Generation of RFIC electrode patterns using electron beam lithography and wet etching characteristic of PZT thin film / Suriati Muhamad
title_fullStr Generation of RFIC electrode patterns using electron beam lithography and wet etching characteristic of PZT thin film / Suriati Muhamad
title_full_unstemmed Generation of RFIC electrode patterns using electron beam lithography and wet etching characteristic of PZT thin film / Suriati Muhamad
title_sort generation of rfic electrode patterns using electron beam lithography and wet etching characteristic of pzt thin film / suriati muhamad
publishDate 2014
url https://ir.uitm.edu.my/id/eprint/86983/1/86983.PDF
https://ir.uitm.edu.my/id/eprint/86983/
_version_ 1794641237971566592
score 13.160551

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