Fabrication and evaluations of PZT thin films by RF reactive sputtering using solid oxygen-source / Sukreen Hana Herman, Kimihiro Sasaki and Tomonobu Hata

• Main Authors: Herman, Sukreen Hana, Kimihiro, Sasaki, Tomonobu, Hata
• Format: Conference or Workshop Item
• Language: English
• Published: 2004
• Subjects: Temperature; Electric apparatus and materials. Electric circuits. Electric networks; Oxygen. Ozone
• Online Access: https://ir.uitm.edu.my/id/eprint/52734/1/52734.PDF; https://ir.uitm.edu.my/id/eprint/52734/

PZT films were prepared on Pt/Ti/SiO2/Si substrate by RF reactive sputtering apparatus using metal-oxide composite ZrTi+PbO2 powder and pellet targets. The main sputtering conditions are as follows: sputtering gas is argon and oxygen, gas pressure is 1810-2Torr, 02/Ar flow rate is 0% and 4.2%, subs...