Thickness and crystalline properties of sputtered polycrystalline silicon thin film deposited on Teflon substrates / Shaiful Bakhtiar Hashim, Norhidayatul Hikmee Mahzan and Sukreen Hana Herman
A Polycrystalline silicon (poly-Si) thin film was successfully deposited on Teflon substrates at a room temperature using radiofrequency (RF) magnetron sputtering. The effects of sputtering pressure on the thickness and crystallinity properties of the thin films have been studied. Raman scattering s...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
2017
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| Subjects: | |
| Online Access: | https://ir.uitm.edu.my/id/eprint/83532/1/83532.pdf https://ir.uitm.edu.my/id/eprint/83532/ https://e-ajuitmct.uitm.edu.my/v3/ |
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