Investigation of insulator oxidation type and thickness on the capacitor electrical characteristic / Mohd Nashriq Shauket Mohd Nasir

• Main Author: Mohd Nasir, Mohd Nashriq Shauket
• Format: Student Project
• Language: English
• Published: 2010
• Subjects: Electricity; Electric current (General)
• Online Access: http://ir.uitm.edu.my/id/eprint/48455/1/48455.pdf; http://ir.uitm.edu.my/id/eprint/48455/

MOS capacitors with Si02 and various thickness of insulator (dielectric) layer were fabricated and characterized. Si02 films were physical characterized by F20 Thin Film Analyzer, Four Point Probe. Capacitance-voltage measurements were utilized to obtain, the effective dielectric constant, effective...