Study on the performance enhancement mechanism of the mosfet device based on Si/SiGe strained silicon / Hashimah Hashim and Ahmad Sabirin Zoolfakar

• Main Authors: Hashim, Hashimah, Zoolfakar, Ahmad Sabirin
• Format: Research Reports
• Language: English
• Published: 2007
• Subjects: Nanostructures; Physical and theoretical chemistry; Apparatus and materials
• Online Access: http://ir.uitm.edu.my/id/eprint/20366/1/20366.pdf; http://ir.uitm.edu.my/id/eprint/20366/

This research is carried out to deposit and characterizes nanostructured Zinc Oxide (ZnO) thin film by radio frequency (RF) magnetron sputtering method for ammonia (NH3 ) gas sensor application. The sensitivity of sensor is mainly depends on the surface reaction effect which strongly depends on the...