Investigation of doping techniques on the silicon based capacitor / Ahmad Akmalhakim Yaacob

• Main Author: Yaacob, Ahmad Akmalhakim
• Format: Thesis
• Language: English
• Published: 2010
• Subjects: Applications of electric power
• Online Access: https://ir.uitm.edu.my/id/eprint/102958/1/102958.pdf; https://ir.uitm.edu.my/id/eprint/102958/

This paper investigates the effect of doping techniques, type of dopant species and plate size on the capacitance density of a silicon based capacitor. The substrate of the silicon wafers were highly doped using either solid source (SS) or spin-on dopant (SOD) method. The wafers were doped according...