Tracking control of a nanopositioner using complementary sensors

• Main Authors: Mahmood, Iskandar Al-Thani, Moheimani, S.O. Reza, Liu, Kexiu
• Format: Article
• Language: English
• Published: Institute of Electrical and Electronics Engineers (IEEE) 2009
• Subjects: Q Science (General); TJ212 Control engineering
• Online Access: http://irep.iium.edu.my/5210/1/Tracking_Control_of_a_Nanopositioner_Using_Complementary_Sensors.pdf; http://irep.iium.edu.my/5210/; http://ieeexplore.ieee.org/xpl/RecentIssue.jsp?punumber=7729

Piezoelectric tube actuators are widely used in atomic force and scanning tunneling microscopy (STM) for nanoscale positioning. There has been a consistent effort to increase the scan speed of these actuators using feedback control techniques. A feedback controller requires a measurement of the scan...