Artificial neural network based hysteresis compensation for piezoelectric tube scanner in atomic force microscopy

• Main Authors: Othman, Yahya Sheriff, Mahmood, Iskandar Al-Thani, Alang Md Rashid, Nahrul Khair, Ridhuan Siradj , Fadly Jashi Darsivan
• Format: Article
• Language: English
• Published: IEEE Xplore 2012
• Subjects: TJ212 Control engineering
• Online Access: http://irep.iium.edu.my/34971/2/06412244.pdf; http://irep.iium.edu.my/34971/; http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6412244&tag=1

Piezoelectric tube scanner is a major component that used in nanoscale imaging tools such as atomic force microscopy (AFM). This is because it can provide precise nanoscale positioning. However the precision is limited by vibration and some nonlinear drawbacks represented by creep and hysteresis. H...