Frequency based hysteresis compensation for piezoelectric tube scanner using artificial neural networks
Piezoelectric positioners are widely used as a nano technology tools. A common application of piezoelectric positioners is the piezoelectric tube scanner. This is because they guarantee a precise nanoscale positioning. However, there are some losses of positioning precession due to vibration in fast...
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Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
Elsevier
2012
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Subjects: | |
Online Access: | http://irep.iium.edu.my/25836/1/Frequency_Based_Hysteresis_Compensation_for_Piezoelectric_Tube_Scanner_using_Artificial_Neural_Networks.pdf http://irep.iium.edu.my/25836/ http://www.sciencedirect.com/science/article/pii/S1877705812026409 |
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