Design and modelling of silicon MEMS accelerometer
In developing micro electro mechanical systems (MEMS), finite element analysis (FEA) is usually relied upon to study these micro-structures in determining stress, deformation, resonance, temperature distribution, electromagnetic interference, and electrical properties. With this kind of approach, th...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Inderscience Publishers
2013
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/32056/1/IJESMS050403_HRAIRI.pdf http://irep.iium.edu.my/32056/ http://www.inderscience.com/info/ingeneral/forthcoming.php?jcode=ijesms |
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