Fabrication of aluminium doped zinc oxide piezoelectric thin film on a silicon substrate for piezoelectric MEMS energy harvesters

• Main Authors: Md Ralib @ Md Raghib, Aliza 'Aini, Nordin, Anis Nurashikin, Salleh, Hanim, Othman, Raihan
• Format: Article
• Language: English
• Published: Springer Berlin / Heidelberg 2012
• Subjects: TP155 Chemical engineering
• Online Access: http://irep.iium.edu.my/25085/1/25085.pdf; http://irep.iium.edu.my/25085/; http://link.springer.com/article/10.1007/s00542-012-1550-9

Thin film piezoelectric materials play an essential role in micro electro mechanical system (MEMS)energy harvesting due to its low power requirement and high available energy densities. Non-ferroelectric piezoelectric materials such as ZnO and AlN are highly silicon compatible making it suitable for...