Fabrication of aluminium doped zinc oxide piezoelectric thin film on a silicon substrate for piezoelectric MEMS energy harvesters

• Main Authors: Md Ralib A.A., Nordin A.N., Salleh H., Othman R.
• 其他作者: 36537608500
• 格式: Conference paper
• 出版: 2023
• 主題: Aluminum; Chemical bonds; Design; Electric properties; Energy harvesting; Fabrication; Field emission microscopes; Finite element method; Magnetron sputtering; MEMS; Natural frequencies; Piezoelectric materials; Sensor nodes; Silicon; Thin films; Vapor deposition; X ray diffraction; Zinc oxide; AlN; Available energy density; Chemical batteries; CMOS Compatible; Deposition methods; Electronic functionality; Energy Harvester; Field emission scanning electron microscopy; Finite element modeling; Low Power; Low power wireless; Material characterizations; Open-circuit output voltages; Output voltages; Piezoelectric couplings; Piezoelectric MEMS; Piezoelectric thin films; Power sources; Resonance frequencies; rf-Magnetron sputtering; Self-powered; Silicon substrates; Thin film piezoelectric; Transversal modes; ZnO; Piezoelectricity

Thin film piezoelectric materials play an essential role in micro electro mechanical system (MEMS) energy harvesting due to its low power requirement and high available energy densities. Non-ferroelectric piezoelectric materials such as ZnO and AlN are highly silicon compatible making it suitable fo...