Fabrication of aluminium doped zinc oxide piezoelectric thin film on a silicon substrate for piezoelectric MEMS energy harvesters

• المؤلفون الرئيسيون: Md Ralib @ Md Raghib, Aliza 'Aini, Nordin, Anis Nurashikin, Salleh, Hanim, Othman, Raihan
• التنسيق: مقال
• اللغة: English
• منشور في: Springer Berlin / Heidelberg 2012
• الموضوعات: TP155 Chemical engineering
• الوصول للمادة أونلاين: http://irep.iium.edu.my/25085/1/25085.pdf; http://irep.iium.edu.my/25085/; http://link.springer.com/article/10.1007/s00542-012-1550-9

Thin film piezoelectric materials play an essential role in micro electro mechanical system (MEMS)energy harvesting due to its low power requirement and high available energy densities. Non-ferroelectric piezoelectric materials such as ZnO and AlN are highly silicon compatible making it suitable for...