Corner compensation mask design on (MEMS) accelerometer structure

• Main Authors: Che Wan Noorakma, Abdullah, Norliana, Yusof, Norhayati, Soin
• Format: Article
• Language: English
• Published: 2014
• Subjects: T Technology (General); TT Handicrafts Arts and crafts
• Online Access: http://eprints.unisza.edu.my/4923/1/FH02-FSTK-15-03894.jpg; http://eprints.unisza.edu.my/4923/

This paper presents the analysis effect of etching temperature and KOH concentration on convex corner undercutting of (MEMS) accelerometer structure. The Intellisuite CAD simulation software was used for the simulation analysis. From the analysis it was found that the optimum etching condition for t...