Corner compensation mask design on (MEMS) accelerometer structure
This paper presents the analysis effect of etching temperature and KOH concentration on convex corner undercutting of (MEMS) accelerometer structure. The Intellisuite CAD simulation software was used for the simulation analysis. From the analysis it was found that the optimum etching condition for t...
Saved in:
Main Authors: | Che Wan Noorakma, Abdullah, Norliana, Yusof, Norhayati, Soin |
---|---|
Format: | Article |
Language: | English |
Published: |
2014
|
Subjects: | |
Online Access: | http://eprints.unisza.edu.my/4923/1/FH02-FSTK-15-03894.jpg http://eprints.unisza.edu.my/4923/ |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Similar Items
-
Beam parameters optimization of MEMS piezoresistive accelerometer by using response surface method
by: Norliana, Yusof, et al.
Published: (2021) -
Corner compensation mask design on (MEMS) accelerometer structure
by: Norliana, Yusof, et al.
Published: (2014) -
Serious game design for terengganu brassware craft heritage
by: Wan Malini, Wan Isa, et al.
Published: (2019) -
Special topic issue on structural adhesive joints
by: Da Silva, Lucas F. M., et al.
Published: (2008) -
Design and fabrication of computer table
by: Amir Hamzah, Azahar
Published: (2007)