Fabrication of amorphous silicon microgap structure for energy saving devices

• Main Authors: Dhahi, T.H.S, Hashim, U, Ali, M.E, Nazwa, T
• Format: Article
• Language: English
• Published: Universiti Kebangsaan Malaysia 2012
• Online Access: http://journalarticle.ukm.my/4863/1/13%2520THS%2520Dhahi.pdf; http://journalarticle.ukm.my/4863/; http://www.ukm.my/jsm/contents.html

We report here the fabrication of microgaps electrodes on amorphous silicon using low cost techniques such as vacuum deposition and conventional lithography. Amorphous silicon is a low cost material and has desirable properties for semiconductor applications. Microgap electrodes have important appli...