Investigating the impact of growth temperature on WS2 thin film

Radio-frequency (RF) Magnetron Sputtering was used to deposit thin tungsten di sulfide (WS2 ) films on top of soda lime glass substrates. Deposition temperature of RF magnetron sputtering was varied from room temperature (RT) to 200o C with 50o C interval to investigate the impact on film cha...

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Bibliographic Details
Main Authors: Md Khan Sobayel Rafiq,, Afida Ayob,, Badariah Bais,, Md Akhtaruzzaman,, Nowshad Amin,
Format: Article
Language:English
Published: Penerbit Universiti Kebangsaan Malaysia 2020
Online Access:http://journalarticle.ukm.my/17356/1/04.pdf
http://journalarticle.ukm.my/17356/
https://www.ukm.my/jkukm/si-31-2020/
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