Characterization of graphene based capacitive microphone

• Main Authors: Haslinawati Mohd Mustapha,, M.F. Mohd Razip Wee,, Ahmad Rifqi Md Zain,, Mohd Ambri Mohamed,
• Format: Article
• Language: English
• Published: Penerbit Universiti Kebangsaan Malaysia 2019
• Online Access: http://journalarticle.ukm.my/13712/1/07%20Haslinawati%20Mohd%20Mustapha.pdf; http://journalarticle.ukm.my/13712/; http://www.ukm.my/jsm/malay_journals/jilid48bil6_2019/KandunganJilid48Bil6_2019.html

This research focuses on the design, fabrication and characterization of the graphene based capacitive microphone. Finite element analysis (FEA) is first simulated in order to design and study the proposed graphene based capacitive microphone. While the fabrication introduced MEMS technique in order...