Characterization of a-CNx Thin Films prepared by RF-PECVD Technique for humidity sensor

• Main Authors: R. Awang,, N.F.H Aziz,, N. Purhanudin,, Z. Zalita,
• Format: Article
• Language: English
• Published: Penerbit Universiti Kebangsaan Malaysia 2017
• Online Access: http://journalarticle.ukm.my/10723/1/20%20R.%20Awang%20.pdf; http://journalarticle.ukm.my/10723/; http://www.ukm.my/jsm/english_journals/vol46num3_2017/contentsVol46num3_2017.html

In this work, amorphous carbon nitride (a-CNx) thin films were deposited by radio frequency (RF) plasma enhanced chemical vapor deposition (RF-PECVD) technique. The RF power and gas mixture of methane (CH4) and nitrogen (N2) flow was kept constant, while the electrode distance was varied from 1 to 6...