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Silicon-post processing CMOS wafers to create integrated sensors, MEMS and electro-optic systems

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Main Authors: Walton, AJ, Stevenson, JTM, Underwood, Ian, Terry, JG, Smith, S, Parkes, William, Dunare, Camelia, Lin, H, Li, Yifan, Henderson, Robert, others
Format: Article
Published: SAIEE 2010
Online Access:http://scholars.utp.edu.my/id/eprint/36598/
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spelling oai:scholars.utp.edu.my:365982023-06-19T04:19:10Z http://scholars.utp.edu.my/id/eprint/36598/ Silicon-post processing CMOS wafers to create integrated sensors, MEMS and electro-optic systems Walton, AJ Stevenson, JTM Underwood, Ian Terry, JG Smith, S Parkes, William Dunare, Camelia Lin, H Li, Yifan Henderson, Robert others SAIEE 2010 Article NonPeerReviewed Walton, AJ and Stevenson, JTM and Underwood, Ian and Terry, JG and Smith, S and Parkes, William and Dunare, Camelia and Lin, H and Li, Yifan and Henderson, Robert and others (2010) Silicon-post processing CMOS wafers to create integrated sensors, MEMS and electro-optic systems. SAIEE Africa Research Journal, 101 (1). pp. 3-10.
institution Universiti Teknologi Petronas
building UTP Resource Centre
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknologi Petronas
content_source UTP Institutional Repository
url_provider http://eprints.utp.edu.my/
format Article
author Walton, AJ
Stevenson, JTM
Underwood, Ian
Terry, JG
Smith, S
Parkes, William
Dunare, Camelia
Lin, H
Li, Yifan
Henderson, Robert
others
spellingShingle Walton, AJ
Stevenson, JTM
Underwood, Ian
Terry, JG
Smith, S
Parkes, William
Dunare, Camelia
Lin, H
Li, Yifan
Henderson, Robert
others
Silicon-post processing CMOS wafers to create integrated sensors, MEMS and electro-optic systems
author_facet Walton, AJ
Stevenson, JTM
Underwood, Ian
Terry, JG
Smith, S
Parkes, William
Dunare, Camelia
Lin, H
Li, Yifan
Henderson, Robert
others
author_sort Walton, AJ
title Silicon-post processing CMOS wafers to create integrated sensors, MEMS and electro-optic systems
title_short Silicon-post processing CMOS wafers to create integrated sensors, MEMS and electro-optic systems
title_full Silicon-post processing CMOS wafers to create integrated sensors, MEMS and electro-optic systems
title_fullStr Silicon-post processing CMOS wafers to create integrated sensors, MEMS and electro-optic systems
title_full_unstemmed Silicon-post processing CMOS wafers to create integrated sensors, MEMS and electro-optic systems
title_sort silicon-post processing cmos wafers to create integrated sensors, mems and electro-optic systems
publisher SAIEE
publishDate 2010
url http://scholars.utp.edu.my/id/eprint/36598/
_version_ 1769845529190072320
score 13.211869

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