The inspection quality to detect scratch using robot vision

• Main Authors: Awang Che Da, Rohani, Mohd Nawi, Nabihah, Jagathesan, Durga Devi, Mohd Azam, Nurul Fatihah, Rajemi, Mohamad Farizal
• Format: Conference or Workshop Item
• Language: English
• Published: 2013
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://repo.uum.edu.my/11613/1/p151.pdf; http://repo.uum.edu.my/11613/

Automated Robotic vision helps to prevent quality problems from occurring.In this research, the concept and operation of robot inspection in fabricating the integrated circuit (IC) is being discussed comprehensively.The results showed the advantages and disadvantages of using this technology to further improve the quality of IC fabrication