An explicit drive algorithm for aiding the design of firing sequence in side-drive micromotor

Finite element analysis (FEA) is used to design the rotor-stator layout and the driving algorithm for electrostatic-actuated side-drive micro electro-mechanical system (MEMS) micromotor. FEA is performed to calculate the generated torque when voltage is applied to a single stator pole of the micromo...

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Bibliographic Details
Main Authors: Pao, William, Wong, Wallace, Lai, Adriana MK
Format: Article
Published: John Wiley & Sons 2008
Subjects:
Online Access:http://eprints.utp.edu.my/6458/1/PaperCEM05-036.pdf
http://onlinelibrary.wiley.com/doi/10.1002/cnm.1100/abstract
http://eprints.utp.edu.my/6458/
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Summary:Finite element analysis (FEA) is used to design the rotor-stator layout and the driving algorithm for electrostatic-actuated side-drive micro electro-mechanical system (MEMS) micromotor. FEA is performed to calculate the generated torque when voltage is applied to a single stator pole of the micromotor. A quasi-static approach is then adopted to model the operation of the entire micromotor. The approach rotates the rotor based on the torque estimated by extrapolating the earlier FEA result for a single stator pole. This enables a fast and accurate enough way to model the performance of the rotor-stator layout and the micromotor drive algorithm