Mass detection using a macro-scale piezoelectric bimorph cantilever

Piezoelectric cantilevers have found a wide usage in sensor technologies for mass sensing and energy harvesting. This paper reports theoretical calculations, Finite Element Method (FEM) simulation and experimental measurements of mass detection using piezoelectric bimorph cantilever (PZT-5H) in macr...

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主要な著者: Rabih, A.A.S., Dennis, J.O., Khir, M.H.M., Abdullah, M.A.
フォーマット: Conference or Workshop Item
出版事項: 2013
オンライン・アクセス:https://www.scopus.com/inward/record.uri?eid=2-s2.0-84894121069&doi=10.1109%2fICSIMA.2013.6717954&partnerID=40&md5=6c7a8c3a116a1d0736d0941bdc204887
http://eprints.utp.edu.my/32517/
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spelling my.utp.eprints.325172022-03-29T14:04:35Z Mass detection using a macro-scale piezoelectric bimorph cantilever Rabih, A.A.S. Dennis, J.O. Khir, M.H.M. Abdullah, M.A. Piezoelectric cantilevers have found a wide usage in sensor technologies for mass sensing and energy harvesting. This paper reports theoretical calculations, Finite Element Method (FEM) simulation and experimental measurements of mass detection using piezoelectric bimorph cantilever (PZT-5H) in macro (mm) scale. The dimensions of the cantilever are 33mm, 10mm, and 0.5mm for length, width, and thickness, respectively. The cantilever has 1.325g static mass with resonance frequency of 240.036 Hz, mass sensitivity of 377 Hz/g and quality factor of 390. The calculated resonance frequency of the device was 1 and 5 higher than the measured and the simulated frequencies, respectively. Air damping is believed to be the reason for lowering values of the simulated and measured resonance frequencies. In addition the extra masses due to the material coating the piezoelectric layer of the cantilever also play a role. Attachment of 8.96mg mass on the tip of the cantilever found to induce �4 Hz frequency shift. Due to the reasonable mass sensitivity of the cantilever, it could be used for mass sensing applications. © 2013 IEEE. 2013 Conference or Workshop Item NonPeerReviewed https://www.scopus.com/inward/record.uri?eid=2-s2.0-84894121069&doi=10.1109%2fICSIMA.2013.6717954&partnerID=40&md5=6c7a8c3a116a1d0736d0941bdc204887 Rabih, A.A.S. and Dennis, J.O. and Khir, M.H.M. and Abdullah, M.A. (2013) Mass detection using a macro-scale piezoelectric bimorph cantilever. In: UNSPECIFIED. http://eprints.utp.edu.my/32517/
institution Universiti Teknologi Petronas
building UTP Resource Centre
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknologi Petronas
content_source UTP Institutional Repository
url_provider http://eprints.utp.edu.my/
description Piezoelectric cantilevers have found a wide usage in sensor technologies for mass sensing and energy harvesting. This paper reports theoretical calculations, Finite Element Method (FEM) simulation and experimental measurements of mass detection using piezoelectric bimorph cantilever (PZT-5H) in macro (mm) scale. The dimensions of the cantilever are 33mm, 10mm, and 0.5mm for length, width, and thickness, respectively. The cantilever has 1.325g static mass with resonance frequency of 240.036 Hz, mass sensitivity of 377 Hz/g and quality factor of 390. The calculated resonance frequency of the device was 1 and 5 higher than the measured and the simulated frequencies, respectively. Air damping is believed to be the reason for lowering values of the simulated and measured resonance frequencies. In addition the extra masses due to the material coating the piezoelectric layer of the cantilever also play a role. Attachment of 8.96mg mass on the tip of the cantilever found to induce �4 Hz frequency shift. Due to the reasonable mass sensitivity of the cantilever, it could be used for mass sensing applications. © 2013 IEEE.
format Conference or Workshop Item
author Rabih, A.A.S.
Dennis, J.O.
Khir, M.H.M.
Abdullah, M.A.
spellingShingle Rabih, A.A.S.
Dennis, J.O.
Khir, M.H.M.
Abdullah, M.A.
Mass detection using a macro-scale piezoelectric bimorph cantilever
author_facet Rabih, A.A.S.
Dennis, J.O.
Khir, M.H.M.
Abdullah, M.A.
author_sort Rabih, A.A.S.
title Mass detection using a macro-scale piezoelectric bimorph cantilever
title_short Mass detection using a macro-scale piezoelectric bimorph cantilever
title_full Mass detection using a macro-scale piezoelectric bimorph cantilever
title_fullStr Mass detection using a macro-scale piezoelectric bimorph cantilever
title_full_unstemmed Mass detection using a macro-scale piezoelectric bimorph cantilever
title_sort mass detection using a macro-scale piezoelectric bimorph cantilever
publishDate 2013
url https://www.scopus.com/inward/record.uri?eid=2-s2.0-84894121069&doi=10.1109%2fICSIMA.2013.6717954&partnerID=40&md5=6c7a8c3a116a1d0736d0941bdc204887
http://eprints.utp.edu.my/32517/
_version_ 1738657397976596480
score 13.251813