Implementation of capacitance as simultaneous sensing and actuating tool in tapered microelectrode arrays for dielectrophoresis-on-a-chip application

• Main Authors: Buyong, M.R., Larki, F., Hakimi Zainal, M.I., Almahi, A.Y.A., Ismail, A.G., Hamzah, A.A., Kayani, A.A.K., Caille, C.E., Yeop Majlis, B.
• Format: Article
• Published: Emerald Group Holdings Ltd. 2020
• Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-85091315300&doi=10.1108%2fMI-04-2020-0023&partnerID=40&md5=fcb12da9dd8676801e336a136810c42f; http://eprints.utp.edu.my/29964/

Purpose: This paper aims to present the capacitance characterization of tapered dielectrophoresis (DEP) microelectrodes as micro-electro-mechanical system sensor and actuator device. The application of DEP-on-a-chip (DOC) can be used to evaluate and correlate the capacitive sensing measurement at an...