Investigations on spatial distribution of low temperature plasma parameters using NiCr wire probe diagnostic

• Main Authors: Naz, M.Y., Shukrullah, S., Sulaiman, S.A., Najeeb-Ur-Rehman,, Khan, Y., Ghaffar, A., Ullah, S.
• Format: Article
• Published: Elsevier B.V. 2016
• Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84969939932&doi=10.1016%2fj.measurement.2016.05.047&partnerID=40&md5=3b5456da1ed085674a6242cc0d0adbaf; http://eprints.utp.edu.my/25669/

This study investigated the workability of a NiCr wire probe diagnostic under low temperature plasma operating conditions. The aim of the work was to design and fabricate a triple Langmuir probe with NiCr alloy for measurements in low temperature rf plasmas. The spatial distribution of electron temp...