Analysis of Bonding Failure in CMOS MEMS Chips

Saved in:
Bibliographic Details
Format: Citation Index Journal
Online Access:http://eprints.utp.edu.my/10224/
Tags: Add Tag
No Tags, Be the first to tag this record!
id my.utp.eprints.10224
record_format eprints
spelling my.utp.eprints.102242013-10-25T01:56:59Z Analysis of Bonding Failure in CMOS MEMS Chips Citation Index Journal NonPeerReviewed UNSPECIFIED Analysis of Bonding Failure in CMOS MEMS Chips. [Citation Index Journal] http://eprints.utp.edu.my/10224/
institution Universiti Teknologi Petronas
building UTP Resource Centre
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknologi Petronas
content_source UTP Institutional Repository
url_provider http://eprints.utp.edu.my/
format Citation Index Journal
title Analysis of Bonding Failure in CMOS MEMS Chips
spellingShingle Analysis of Bonding Failure in CMOS MEMS Chips
title_short Analysis of Bonding Failure in CMOS MEMS Chips
title_full Analysis of Bonding Failure in CMOS MEMS Chips
title_fullStr Analysis of Bonding Failure in CMOS MEMS Chips
title_full_unstemmed Analysis of Bonding Failure in CMOS MEMS Chips
title_sort analysis of bonding failure in cmos mems chips
url http://eprints.utp.edu.my/10224/
_version_ 1738655825970331648
score 13.214268