Analysis of device design and material structure on MEMS variable capacitor
Micro-electromechanical system (MEMS) has been one of the most promising technologies for the 21st century. With this technology, MEMS components are not only depending on the electrical properties but also other physics properties. MEMS components can generate the effect as good as the conventional...
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| Format: | Thesis |
| Language: | English |
| Published: |
2022
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| Online Access: | http://eprints.utm.my/id/eprint/99524/1/LowChunKangMSKE2022.pdf http://eprints.utm.my/id/eprint/99524/ http://dms.library.utm.my:8080/vital/access/manager/Repository/vital:149943 |
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