Design and simulation of 2D zinc oxide based saw gas sensor for hydrogen gas sensing
The purpose of this research is to design a 2D ZnO - LiNbO3 layer structured surface acoustic wave (SAW) - based sensor for sensing hydrogen gas using Finite Element Method (FEM) in COMSOL Multiphysics software. The study also focuses on the effect of thickness of Zinc Oxide sensing layer in the det...
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my.utm.988672023-02-02T09:56:30Z http://eprints.utm.my/id/eprint/98867/ Design and simulation of 2D zinc oxide based saw gas sensor for hydrogen gas sensing Mohammad, Adib Mohamed Sultan, Suhana Tan, Michael Loong Peng TK Electrical engineering. Electronics Nuclear engineering The purpose of this research is to design a 2D ZnO - LiNbO3 layer structured surface acoustic wave (SAW) - based sensor for sensing hydrogen gas using Finite Element Method (FEM) in COMSOL Multiphysics software. The study also focuses on the effect of thickness of Zinc Oxide sensing layer in the detection and sensitivity of hydrogen gas present. The result shows that as thickness of the intermediate layer (ZnO) is varied from 0.4 µm to 2.0 µm the frequency shift increases and the total displacement varies having the highest displacement at 0.8 µm. This suggests that with the geometry of device used 0.8 µm is the optimal thickness of the ZnO intermediate layer for best performance in sensing hydrogen gas in the atmosphere. 2022 Conference or Workshop Item PeerReviewed Mohammad, Adib and Mohamed Sultan, Suhana and Tan, Michael Loong Peng (2022) Design and simulation of 2D zinc oxide based saw gas sensor for hydrogen gas sensing. In: 2022 IEEE International Conference on Semiconductor Electronics, ICSE 2022, 15 - 17 August 2022, Virtual, Kuala Lumpur. http://dx.doi.org/10.1109/ICSE56004.2022.9863098 |
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TK Electrical engineering. Electronics Nuclear engineering Mohammad, Adib Mohamed Sultan, Suhana Tan, Michael Loong Peng Design and simulation of 2D zinc oxide based saw gas sensor for hydrogen gas sensing |
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The purpose of this research is to design a 2D ZnO - LiNbO3 layer structured surface acoustic wave (SAW) - based sensor for sensing hydrogen gas using Finite Element Method (FEM) in COMSOL Multiphysics software. The study also focuses on the effect of thickness of Zinc Oxide sensing layer in the detection and sensitivity of hydrogen gas present. The result shows that as thickness of the intermediate layer (ZnO) is varied from 0.4 µm to 2.0 µm the frequency shift increases and the total displacement varies having the highest displacement at 0.8 µm. This suggests that with the geometry of device used 0.8 µm is the optimal thickness of the ZnO intermediate layer for best performance in sensing hydrogen gas in the atmosphere. |
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Conference or Workshop Item |
author |
Mohammad, Adib Mohamed Sultan, Suhana Tan, Michael Loong Peng |
author_facet |
Mohammad, Adib Mohamed Sultan, Suhana Tan, Michael Loong Peng |
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Mohammad, Adib |
title |
Design and simulation of 2D zinc oxide based saw gas sensor for hydrogen gas sensing |
title_short |
Design and simulation of 2D zinc oxide based saw gas sensor for hydrogen gas sensing |
title_full |
Design and simulation of 2D zinc oxide based saw gas sensor for hydrogen gas sensing |
title_fullStr |
Design and simulation of 2D zinc oxide based saw gas sensor for hydrogen gas sensing |
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Design and simulation of 2D zinc oxide based saw gas sensor for hydrogen gas sensing |
title_sort |
design and simulation of 2d zinc oxide based saw gas sensor for hydrogen gas sensing |
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2022 |
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http://eprints.utm.my/id/eprint/98867/ http://dx.doi.org/10.1109/ICSE56004.2022.9863098 |
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