Design and simulation of 2D zinc oxide based saw gas sensor for hydrogen gas sensing

• Main Authors: Mohammad, Adib, Mohamed Sultan, Suhana, Tan, Michael Loong Peng
• Format: Conference or Workshop Item
• Published: 2022
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.utm.my/id/eprint/98867/; http://dx.doi.org/10.1109/ICSE56004.2022.9863098

The purpose of this research is to design a 2D ZnO - LiNbO3 layer structured surface acoustic wave (SAW) - based sensor for sensing hydrogen gas using Finite Element Method (FEM) in COMSOL Multiphysics software. The study also focuses on the effect of thickness of Zinc Oxide sensing layer in the detection and sensitivity of hydrogen gas present. The result shows that as thickness of the intermediate layer (ZnO) is varied from 0.4 µm to 2.0 µm the frequency shift increases and the total displacement varies having the highest displacement at 0.8 µm. This suggests that with the geometry of device used 0.8 µm is the optimal thickness of the ZnO intermediate layer for best performance in sensing hydrogen gas in the atmosphere.