Controlled defect on multilayer graphene surface by oxygen plasma

• Main Authors: Morsin, Marriatyi, Isaak, Suhaila, Morsin, Marlia, Yusof, Yusmeeraz
• Format: Conference or Workshop Item
• Language: English
• Published: 2017
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.utm.my/id/eprint/97020/1/SuhailaIsaak2017_ControlledDefectOnMultilayerGrapheneSurface.pdf; http://eprints.utm.my/id/eprint/97020/; http://dx.doi.org/10.1063/1.4968370

The study pertaining defect fabrication of graphene has gained interest nowadays. To date, the fabrication of the defect using reactive ion etching on the oxygen flow rate has not been adequately studied. In this work, fabrication defect on multilayer graphene using reactive ion etching at 30 sccm a...