Application of micro-electro-mechanical systems (MEMS) as sensors: A review

• Main Authors: Mohd. Faudzi, Ahmad Athif, Sabzehmeidani, Yaser, Koichi, Suzumori
• Format: Article
• Language: English
• Published: Fuji Technology Press 2020
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.utm.my/id/eprint/92360/1/AhmadAthifMohdFaudzi2020_ApplicationofMicroElectroMechanicalSystems.pdf; http://eprints.utm.my/id/eprint/92360/; http://dx.doi.org/10.20965/jrm.2020.p0281

This paper presents a review of the current applications of Micro-Electro-Mechanical Systems (MEMS) in the robotics and industrial applications. MEMS are widely used as actuators or sensors in numerous respects of our daily life as well as automation lines and industrial applications. Intersection of founding new polymers and composites such as silicon and micro manufacturing technologies performing micro-machining and micro-assembly brings about re-markable growth of application and efficacy of MEMS devices. MEMS indicated huge improvement in size reduction, higher reliability, multi-functionality, cus-tomized design, and power usage. Demonstration of various devices and technologies utilized in robotics and industrial applications are illustrated in this article along with the use and the role of silicon in the development of the sensors. Some future trends and its perspectives are also discussed.