High fidelity simulation models for equipment performance prediction in semiconductor industry

Semiconductor manufacturing is a high-technology industry which is capital intensive and operationally complex with its process technology refreshed every two years. Precision in capacity planning is critical to ensure the right amount of capital equipment is purchased to match the demand while meet...

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Bibliographic Details
Main Author: Vali Mohamed, Anwar Ali
Format: Thesis
Language:English
Published: 2014
Subjects:
Online Access:http://eprints.utm.my/id/eprint/78114/1/AnwarAliValiPRS20141.pdf
http://eprints.utm.my/id/eprint/78114/
http://dms.library.utm.my:8080/vital/access/manager/Repository/vital:82452
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