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A stainless-steel-based implantable pressure sensor chip and its integration by microwelding

A stainless-steel (SS) chip of capacitive pressure sensor and its integration method are developed with a focus on smart implant applications. The sensors are entirely microfabricated with biocompatible materials, through thermal bonding of gold-polyimide diaphragm film to the chip dies made of medi...

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Bibliographic Details
Main Authors: Chen, X., Brox, D., Assadsangabi, B., Mohamed Ali, M. S., Takahata, K.
Format: Article
Published: Elsevier B.V. 2017
Subjects:
TK Electrical engineering. Electronics Nuclear engineering
Online Access:http://eprints.utm.my/id/eprint/75764/
https://www.scopus.com/inward/record.uri?eid=2-s2.0-85014095159&doi=10.1016%2fj.sna.2017.01.017&partnerID=40&md5=d07755ba339c7f5188110a7e68d54e2c
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http://eprints.utm.my/id/eprint/75764/
https://www.scopus.com/inward/record.uri?eid=2-s2.0-85014095159&doi=10.1016%2fj.sna.2017.01.017&partnerID=40&md5=d07755ba339c7f5188110a7e68d54e2c

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