Optimized distance for non-damaging in laser cleaning preparation

Laser Technology has wide application in industry as well as in scientific research. Semiconductor industry also interested to use laser for cleaning contaminant. However, until today, no laser has been deployed to take over the traditional method due to lack of intension on it. As a first step to e...

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Bibliographic Details
Main Authors: Sin, Chong Hai, Abu Bakar, Mohd. Aizat, Abd. Munap, Daing Farhana Hanum, Krishnan, Ganesan, Bidin, Noriah
Format: Article
Language:English
Published: Penerbit UTM 2016
Subjects:
Online Access:http://eprints.utm.my/id/eprint/70143/1/MohdAizatAbu2014_Optimizeddistancefornon-damaging.pdf
http://eprints.utm.my/id/eprint/70143/
http://dx.doi.org/10.11113/jt.v78.7505
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