Precision micro-machining of silicon and glass

• Main Authors: Venkatesh, V. C., Izman, S., Sharif, S., Mon, T. T., Konneh, M.
• Format: Article
• Published: 2002
• Subjects: TJ Mechanical engineering and machinery
• Online Access: http://eprints.utm.my/id/eprint/6754/; http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=1189334

This research work is concentrated on machining of flat surfaces on silicon and glass for applications like IC chips and small optical lenses. Aspheric surfaces were also generated on silicon and germanium. Grinding was done to give a good surface finish and at the same time focused on getting the m...