Metal oxide film deposition by ASPPS with suction type feedstock feeder
Solution precursor plasma spray (SPPS) is hoped to be a rapid functional film deposition process because of high chemical reactivity of its thermal plasma jet. In this study, in order to promote the reproducibility of film deposition by stable and continuous feedstock feeding in case of atmospheric...
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| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Published: |
2015
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/62088/ http://rnavi.ndl.go.jp/books/2016/09/026741463.php |
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| Summary: | Solution precursor plasma spray (SPPS) is hoped to be a rapid functional film deposition process because of high chemical reactivity of its thermal plasma jet. In this study, in order to promote the reproducibility of film deposition by stable and continuous feedstock feeding in case of atmospheric SPPS (ASPPS), suction type feedstock feeder was developed and titanium oxide film deposition by ASPPS using the feedstock feeder was carried out. Consequently, the feedstock TTIB was continuously fed into the plasma jet on the condition of 10 l/min. in Ar working gas and it was confirmed that the anatase rich photo-catalytic titanium oxide film could be deposited on the condition of 100mm in spray distance. |
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