Effects of friction modifier additives on HDD substrate defects and surface topography during CMP
This study investigates the effects of Friction Modifier Additives (FMA) added into the polishing slurry on Aluminium Nickel Phosphorous plated (Al-NiP) Hard-Disk Drive (HDD) substrates surface topography and surface defects during Chemical Mechanical Polishing (CMP) process. It is confirmed that ad...
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| Main Authors: | , |
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| Format: | Article |
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Trans Tech Publication
2014
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/52601/ http://dx.doi.org/10.4028/www.scientific.net/AMR.845.894 |
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