Prediction of hardness in tia1n coating process using support vector machine

• Main Authors: Mohamad, M. A., Ali, N. A., Sallehuddin, R., Haron, H.
• Format: Conference or Workshop Item
• Published: 2013
• Subjects: QA75 Electronic computers. Computer science
• Online Access: http://eprints.utm.my/id/eprint/51249/; http://dx.doi.org/ 10.1109/CIMSim.2012.63

This paper reviewed on prediction of hardness performances for Titanium Aluminium Nitride (TiA1N) coating process. A new application in predicting the hardness performances of TiA1N coatings using a method called support vector machine (SVM) is investigated. TiA1N coatings are usually used in high-speed machining due to its excellent surface hardness and wear resistance. The TiA1N coatings were produced using Physical Vapour Deposition magnetron sputtering process. The coating process parameter will be selected as the input parameters and the hardness as an output of the process. There are several coating process parameters in TiA1N coating process but for this paper only three coating process parameter will be considered. A support vector machine model will be proposed to predict the coating hardness with respect to changes in input process parameters which are substrate sputtering power, bias voltage and temperature. In this paper, a literature survey concerning the prediction technique of TiA1N coating process is conducted in order to clarify their coating process and coating process parameters. The issues and trend in prediction of hardness performances for TiA1N coating process also discussed based on various perspectives.