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Low cost diffuser based micropump using pinch actuation

Planar pinch micropump with the integration of two diffuser valve elements has been reported. The fabrication of the micropump is carried out by utilizing simple hot embossing technique for microdiffuser imprinting and spin coating for membrane construction. Parameter of diffuser design is optimized...

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Bibliographic Details
Main Authors: Chee, Pei Song, Abdul Rahim, Ruzairi, Hashim, U., Arsat, Rashidah, Leow, Pei Ling
Format: Article
Language:English
Published: Trans Tech Publications Ltd. 2012
Subjects:
TA Engineering (General). Civil engineering (General)
Online Access:http://eprints.utm.my/id/eprint/47166/1/RuzairiAbdulRahim2012_LowCostDiffuserBasedMicropump.pdf
http://eprints.utm.my/id/eprint/47166/
https://dx.doi.org/10.4028/www.scientific.net/AMR.422.397
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http://eprints.utm.my/id/eprint/47166/1/RuzairiAbdulRahim2012_LowCostDiffuserBasedMicropump.pdf
http://eprints.utm.my/id/eprint/47166/
https://dx.doi.org/10.4028/www.scientific.net/AMR.422.397

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