Studies of the self-assembled growth mechanism on nanocrystalline silicon nanodots

• Main Authors: Sakrani, Samsudi, Sumpono, Imam, Tarjudin, Nurul Aini, Othaman, Zulkafli
• Format: Article
• Language: English
• Published: Ibnu Sina Institute for Fundamental Science Studies, UTM 2010
• Subjects: Q Science (General)
• Online Access: http://eprints.utm.my/id/eprint/38423/1/SamsudiSakrani2010_StudiesoftheSelfAssembledGrowthMechanismon.pdf; http://eprints.utm.my/id/eprint/38423/; http://mjfas.ibnusina.utm.my/index.php/jfs/article/view/183

Nanocrystalline silicon (nc-Si) nanodots have been grown on corning glass (7059) substrate using a self-assembly VHF-PECVD method under the following experimental conditions: Fixed deposition temperatures of 300/400 °C, deposition times 30/60 s, plasma power of 10 W, silane gas flow rate of 10 sccm,...