Focused ion beam milling of exfoliated graphene for prototyping of electronic devices

• Main Authors: Schmidt, Marek E., Johari, Zaharah, Ismail, Razali, Mizuta, Hiroshi, Chong, Harold M. H.
• Format: Article
• Published: Elsevier 2012
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.utm.my/id/eprint/33652/; http://dx.doi.org/10.1016/j.mee.2012.07.090

We demonstrate a focused ion beam (FIB) prototyping technique that accurately aligns a two terminal contact structure to exfoliated graphene. Alignment accuracy of better than 250 nm has been achieved without direct FIB imaging of the graphene. In situ deposited tungsten is used to contact the graph...