High-aspect-ratio, 3-D micromachining of carbon-nanotube forests by micro-electro-discharge machining in air

• Main Authors: Dahmardeh, M., Khalid, W., Mohamed Ali, Mohamed Sultan, Choi, Y., Yaghoobi, P., Nojeh, A., Takahata, K.
• Format: Book Section
• Published: IEEE Explorer 2011
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.utm.my/id/eprint/29170/; http://dx.doi.org/10.1109/MEMSYS.2011.5734414

This paper reports micro-electro-discharge machining of vertically aligned carbon nanotube forests for the formation of high-aspect-ratio, three-dimensional microstructures in the material. The developed forest machining method is a dry process performed in air, generating high-frequency pulses of e...